Figure 3From: The Characteristics of Seebeck Coefficient in Silicon Nanowires Manufactured by CMOS Compatible ProcessThe variations of electrical conductivities as a function of nanowire width in n-/p-legs. The open and closed circles correspond to n-leg and p-leg, respectively. N-leg is doped using phosphorus with the dose of 5 × 1015 cm−2. P-leg is doped using BF2 with the dose of 5 × 1015 cm−2 Back to article page