Figure 12
AFM images at a laser fluence of 5 J/cm2 for 8 shots at a 10° angles of incidence, b 20° angles of incidence, c atomic force microscope image. AFM images for silicon surface irradiated at laser fluence of 0.15 J/cm2 and 90° angle of incidence in the proximity of c 25-micron-thick blade edge mask and c 30 micron diameter copper wire mask [87]