Figure 5From: The Microscopic Origin of Residual Stress for Flat Self-Actuating Piezoelectric CantileversThe harmonic response of the three different length self-actuating piezoelectric cantilevers. The inset SEM photograph shows flat cantilever arrays. The length of the cantilevers were 200, 400, and 600 μm with a 2.05-μm thickness.Back to article page