Transmission electron microscopy (TEM), scanning TEM and energy dispersive X-ray spectroscopy (EDS) results of the multilayer MnGe nanodots. (a) A typical low-magnification plane-view bright-field TEM image showing MnGe nanodots (dark spots). (b) A plane-view low-angle dark-field STEM image showing the MnGe nanodots (white spots). (c) A low-magnification cross-sectional bright-field TEM image showing the obtained MnGe nanodot array in a large area. (d) A higher-magnification cross-sectional TEM image and (e) a cross-section STEM image, both showing the MnGe nanodot arrays. (f) A EDS profile showing the Mn and Ge peaks. (g, h) EDS line-scan profiles of the marked line in (b) and (e) using Mn K peak, respectively, confirming nanodots being Mn rich. All TEM images are taken from the same sample.