C-V characteristics of annealed HfO
. C-V characteristics of HfO2/SRSO/SiO2 annealed at 800°C for 15 min (a, b) and at 950°C for 15 min (c, d) measured at 1 MHz (a, c) and versus frequency measured at 6 V sweep voltage (b, d). (e) The variation of ΔV
fb versus sweep voltage for two annealing temperatures; (f) the comparison of C-V curves measured at 1 MHz versus annealing temperature. Annealing time is 15 min for all the figures.