Figure 3From: Relationship between structural changes, hydrogen content and annealing in stacks of ultrathin Si/Ge amorphous layers IR absorbance spectra in the stretching mode range of the wave number for a-Si/a-Ge MLs sputtered under H flow rate of 0.8 ml/min. B1 is the spectrum of the as-deposited layer, B2 the spectrum after annealing at 400°C for 1 h and B3 the one after annealing at 400°C for 10 h.Back to article page