Figure 1
From: Ordered GeSi nanorings grown on patterned Si (001) substrates
Schematic illustration for the fabrication of ordered pit-pattern. (a) Closed-packed PS single ML pattern. (b) PS pattern after O2 RIE. (c) Au film deposition. (d) Removing PS pattern in THF. (e) KOH selective etching. (f) Inverted pyramid-like pits pattern with {111} facets after Au was removed. The panels at the right side show the AFM images at corresponding stages.