Figure 2
From: Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes
SEM images of representative "as-manufactured" structures. (a) The image shows the nano-honeycomb structures created by the photolithographic process. The detailed images show the rough surface on the bottom side (b) and the top side (c) of the nano-honeycomb structures created by the ICP-etching process using the gaseous mixture of SF6 + O2.