Figure 5From: CMOS-compatible dense arrays of Ge quantum dots on the Si(001) surface: hut cluster nucleation, atomic structure and array life cycle during UHV MBE growth Top views of the pyramidal QDs consisting of 2 and 6 monoatomic steps and (001) terraces on the WL: (a) 2 and (b) 6 terraces; 1, 2 and 3 designate WL, the first and the second layers of the clusters, respectively.Back to article page