Shrinking of Solid-state Nanopores by Direct Thermal Heating

Table 1 EDS analysis of pore at different steps of the process.

Processing condition	Element	Wt%	At.%
Before FIB drilling	O	55.97	69.06
	Si	44.03	30.94
After FIB drilling	O	55.60	68.73
	Si	44.40	31.27
After heating	O	56.33	69.37
	Si	43.67	30.63

The analysis showed no O depletion during the process. The weight and atomic percentages of the nanopore edges remained almost constant. No traces of hydrocarbons were found at any step.