TEM image and EDXS of InN surface following electron beam impact. (a) TEM image of the destroyed nanocrystalline domains deposited on Ni grids after electron irradiation. (b) EDXS of the e-beam-irradiated crystal nanodomains. Only the indium peak is observed. (c) Indium nanocrystal sphere of tetragonal structure formed after e-beam irradiation. (d) SAED of the nanosphere with the tetragonal crystalline structure of pure indium.