Figure 6

Morphology of InN nanostructures grown on Si [100] substrate, indicating coexistence of the crystal line InN, In ₂ O ₃ and the amorphous oxynitride In-O _y -N _x phases. (a) 5-nm crystal domains (A), 40-nm crystal domains (C), amorphous oxynitride phase (E), boundary between amorphous and crystal phase (F). (b) Crystal cubic In₂O₃ nanodomains. In the inset, the FFT images are indicated. The crystal In₂O₃ nanostructure within the circle (B) is 25 nm wide. The In₂O₃ crystal nanostructures are rotated with respect to each other (D).