Figure 3From: Band alignment and enhanced breakdown field of simultaneously oxidized and nitrided Zr film on Si E g values of ZrO 2 and IL extracted from their respective O 1 s plasmon loss spectra. The calculated values of E g(ZrO2), E g(IL), ΔE c(ZrO2/Si), ΔE c(IL/Si), and ΔE c(ZrO2/IL) in the band alignment of ZrO2/IL/Si system.Back to article page