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Figure 1 | Nanoscale Research Letters

Figure 1

From: Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe

Figure 1

SEM and AFM images. (a) SEM image of DLC-coated triangular pyramid tip, together with the schematic of the scratch direction. (b) The AFM images of the typical grooves scratched at 10 μN of tip force, 1 μm/s of speed. (c) The cross-section profiles of the grooves at the position as indicated by the line. (d) Schematic of oblique cutting, inclination angle θ defined as the angle between the directions of scratching and cutting face.

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