Figure 5From: STEM nanoanalysis of Au/Pt/Ti-Si3N4 interfacial defects and reactions during local stress of SiGe HBTs EFTEM analysis of the emitter contact after 30 min of stress. (a) Green and clear blue represent respectively titanium (Ti) and fluorine (F). (b) Nitrogen EFTEM analysis of the emitter contact after stress.Back to article page