Figure 4From: Investigation of cracks in GaN films grown by combined hydride and metal organic vapor-phase epitaxial method The determination of the CL. (a) The cross-sectional image of SEM. (b) Panchromatic CL cross-sectional image of epitaxial layer grown by MOCVD-HVPE, the white lines noted by red arrow line are cracks. (a) and (b) were taken simultaneously. (c) The panchromatic CL image of the sample etched for 10 min.Back to article page