Figure 1From: Immobilization of enzyme and antibody on ALD-HfO2-EIS structure by NH3 plasma treatmentSchematics of NH 2 molecular and covalent bonding process flow of ALD-HfO 2 -EIS. (a) NH2 molecular formed after plasma treatment. (b) Covalent bonding process flow of ALD-HfO2-EIS based on sensing membrane.Back to article page