Account

Table 1 Performance of the measurement algorithm

From: Non-equidistant scanning approach for millimetre-sized SPM measurements

Accuracy	20 nm	3 nm
Grating	18%	34%
Microchip	42%	54%
Solar cell	41%	68%

This table summarizes the total tip path reduction for two different final accuracies (20 and 3 nm). Note that 100% corresponds to the path needed for obtaining the regularly sampled data with the same accuracy.

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