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Table 1 Performance of the measurement algorithm

From: Non-equidistant scanning approach for millimetre-sized SPM measurements

Accuracy 20 nm 3 nm
Grating 18% 34%
Microchip 42% 54%
Solar cell 41% 68%
  1. This table summarizes the total tip path reduction for two different final accuracies (20 and 3 nm). Note that 100% corresponds to the path needed for obtaining the regularly sampled data with the same accuracy.