Figure 1From: Relation between electrical properties of aerosol-deposited BaTiO3 thin films and their mechanical hardness measured by nano-indentationXRD patterns of the 0.2-μm-thick BaTiO 3 thin films on Cu and SUS substrates. (a) Cu and (b) SUS substrates. (c) Cu and SUS substrates between 30.5° and 32.5°.Back to article page