Figure 1

Typical SEM images of the ZnO nanostructure synthesized on various ALD-grown seed layers. The thickness of ALD-grown Al₂O₃ was fixed at 5 nm, on (a) ZnO/Al₂O₃ (1 nm/5 nm), (b) ZnO/Al₂O₃ (6 nm/5 nm), (c) ZnO/Al₂O₃ (12 nm/5 nm), and (d) ZnO/Al₂O₃ (18 nm/5 nm). The tilted (30°) views of SEM images are shown in (e), (f), (g), and (h), respectively. Inset figures (a) to (d) were magnified images.