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Figure 5 | Nanoscale Research Letters

Figure 5

From: Analysis of p-Si macropore etching using FFT-impedance spectroscopy

Figure 5

The effect of HF and/or water concentrations on six fitting parameters (extracted from Figure 4). A, 48 wt.% HF/DMF; B, 48 wt.% HF/DMA; C, 73 wt.% HF/DMF; and D, 73 wt.% HF/DMA electrolytes. a) and b) show no clear dependence of the time constants (τ2 and τ3) on the HF concentration; c) and d) show that the HF concentration is proportional to the transient resistances (Rp1 and Rp3); e) and f) show the effect of water on the time constants (τ2 and τ3); g) shows no clear effect of the water concentration on Rp3; and h) shows that neither the HF concentration nor the water content has effect on the sum of the transient resistances (Rp2 and Rp3).

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