Table 1 Comparison of the parameters of the used analysis methods
From: Analysis methods for meso- and macroporous silicon etching baths
Parameter | Titration | F-ISE | Cuvette test |
|---|---|---|---|
Analyte | HF | HF | Organic content |
Measurement method | Indirect | Direct | Direct |
Measurement range | >50 mmol L−1 | 0.05 to 50 mmol L−1 | 0.08 to 2.7 mmol L−1 |
Time for measurement | 15 min | 5 min | 4 h |
Time for calibration | 5 mina | 15 minb | Only once |
Suitable for acetic acid containing electrolytes? | No | Yes | Yes |
Relative error | 3.3 % | 1.5 % | 2.1 % |
Standard deviation | 0.1 mol L−1(n = 10) | 0.2 mol L−1(n = 10) | 0.01 mol L−1(n = 20) |
Inline analysis possible? | Yes | Yes | No |