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Figure 7 | Nanoscale Research Letters

Figure 7

From: Triangle pore arrays fabricated on Si (111) substrate by sphere lithography combined with metal-assisted chemical etching and anisotropic chemical etching

Figure 7

Effect of TMAH concentration on the morphology of macroporous silicon. SEM images of macroporous silicon after chemical etching in 1 wt.% TMAH for (a) 10, (b) 20, and (c) 30 min. The inset shows a high-magnification image of each specimen. (d) Tilted image taken at an angle of 45° to the surface. The conditions for Au-assisted chemical etching of (111) silicon were the same as those in Figure 5.

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