Figure 6

HRTEM data for the five-layer Ge/Si heterostructure with buried Ge clusters. h _Ge = 6 Å (see Figure2a); (a) a long shot, the mark is 100 nm; (b) Ge clusters resolved in a layer, figure ‘1’ indicates one of the clusters, ‘2’ shows a WL segment; the mark is 50 nm; (c),(d) magnified images of a Ge cluster, the panel (d) corresponds to the light square in the panel (c); the marks are 10 and 5 nm, respectively; (e) a close-up image of a domain next to the top of the cluster imaged in (d); (f) the Fourier transform of the image (e), the measured periods are ∼5.4 Å along [001] and ∼3.8 Å along [110]; arrows in panels (c) to (f) indicate the [001] direction.