Table 1 Si wafer characteristics and PS parameters
Template number | Si wafer doping | Si wafer resistivity, ρ | Porosity of PS, p | Thickness of PS, d |
|---|---|---|---|---|
(Ω·cm) | (%) | (μm) | ||
PS1 | Antimony | 0.01 | 50 to 55 | 1 |
PS2 | 80 to 85 | |||
PS3 | 80 to 85 | 7 | ||
PS4 | Boron | 0.3 | 60 to 65 | 2.5 to 3 |
Template number | Si wafer doping | Si wafer resistivity, ρ | Porosity of PS, p | Thickness of PS, d |
|---|---|---|---|---|
(Ω·cm) | (%) | (μm) | ||
PS1 | Antimony | 0.01 | 50 to 55 | 1 |
PS2 | 80 to 85 | |||
PS3 | 80 to 85 | 7 | ||
PS4 | Boron | 0.3 | 60 to 65 | 2.5 to 3 |