Non-oxidized porous silicon-based power AC switch peripheries

Table 1 Process conditions and electrical I - V results found in different electrical studies of vertical metal-PS-Si(P) structures

Paper reference	P-type substrate		C_El	J_etch (mA/cm²)	P(%)	d_PS(nm)	t_PS (μm)	ML	PS contact (according to the authors)	I-V results		Model
Paper reference	O_S	ρ_S(Ω cm)	C_El	J_etch (mA/cm²)	P(%)	d_PS(nm)	t_PS (μm)	ML	PS contact (according to the authors)	Range (V)	WF	Model
Ben-Chorin et al.[14]	100	5	HF (49%) + ethanol (1:1)	30	?	3 to 5	0.5 to 15	Au NiCr In	Quasi-ohmic	[−100, +100]	Quasi-linear^a	BC
Ben-Chorin et al.[14]	100	0.075	HF (49%) + ethanol (1:1)	100	?	3 to 5	0.5 to 15	Au NiCr In	Quasi-ohmic	[−100, +100]	Quasi-linear^a	BC
Balagurov et al.[15]	111	0.005	HF (48%) + ethanol (5:1)	13	30	>10	1.5 to 30	Au Al	Ohmic	[0, +100]	Linear^b	AN
Bouaïcha et al.[7]	100	1	HF (40%) + ethanol (1:1)	?	48	2 to 5	?	Al	Ohmic	[0, +5]	Nonlinear	BC
					62
					75
Remaki et al.[16]	100	0.02	HF (50%) + ethanol (2:1)	75	50	MESO	1 to 10	Au	Schottky^c	[−0.5, +0.5]	Quasi-linear^d	BC
Anderson et al.[17]	100	30 to 40	HF (45%)	10	36	?	0.5 to 5	Al	Schottky	[−0.5, +0.5]	Nonlinear	BC
Anderson et al.[17]	111	0.01 to 0.03	HF (45%)	10	23	?	0.5 to 5	Al	Schottky	[−0.5, +0.5]	Nonlinear	AN
Pulsford et al.[18]	?	25	HF + H₂O + ethanol (2:3:5)	20	?	?	1.5 and 135	Ca Mg Sb Au Ag	Ohmic^e	[0, +1]	Nonlinear	BC
Stievenard and Deresmes[19]	100	0.01	HF (40%) + ethanol (1:1)	20	45	MESO	30	Al	Schottky	[−1, +1]	Quasi-linear^d	AN
Islam et al.[20]	100	6 to 10	HF (48%) + ethanol (1:1)	10	?	MESO	30 to 50	Al	Quasi-ohmic	[−50, +50]	Quasi-linear	BC

All the available information about the starting material (the substrate orientation O_S and its resistivity ρ_S), the anodization conditions (the electrolyte composition C_El and the etching current density J_etch), the PS features (the porosity P, the pore diameter d_PS, and the PS thickness t_PS), the electrical contacts (the metal layer ML used to contact PS and the resulting electrical contact observed according to the authors), and the electrical I V results (the studied voltage range and the waveforms WF of the I V characteristics) are given. Two models coming from Anderson et al. (AN)[17, 19] and Ben-Chorin et al. (BC)[21] are used to interpret all the observations. ^aExcept for PS thickness lower than 2 μm; ^bspace-charge-limited current is observed for PS thicknesses lower than 28 μm; ^cnot true in ambient air (quasi-ohmic); ^donly in ambient air; ^eimpact of the metal barrier is visible at higher voltage. The question marks were added to avoid bad interpretations of our classification as different behaviors may be observed in the same paper.