Figure 1
From: In situ-grown hexagonal silicon nanocrystals in silicon carbide-based films
Cross-sectional HRTEM images of the Si-NCs embedded in a silicon carbide-based film. (a) Approximately 7-nm and (c) approximately 9-nm Si-NCs, enclosed by red circles for easy identification. (b) Selected area of the electron diffraction pattern from the portion indicated in (a). Presence of (0001)-oriented crystallites of the hexagonal silicon phase is confirmed.