Table 1 Parameters used in each step of the annular milling process to fabricate GaAs needles with a reduced diameter along a large range
From: Analysis of the 3D distribution of stacked self-assembled quantum dots by electron tomography
Step | Inner diameter (nm) | Outer diameter (nm) | Current (pA) | Voltage (kV) |
|---|---|---|---|---|
1 | 1,000 | 1,500 | 100 | 30 |
2 | 800 | 1,400 | 81 | 20 |
3 | 700 | 1,200 | 23 | 20 |
4 | 600 | 1,000 | 23 | 20 |
5 | 500 | 850 | 23 | 20 |
6 | 400 | 700 | 4 | 20 |
7 | 300 | 600 | 4 | 20 |
8 | 150 | 400 | 4 | 20 |
9 | - | - | 70 | 5 |