Figure 1From: Discrete distribution of implanted and annealed arsenic atoms in silicon nanowires and its effect on device performanceDiscrete As distribution in a Si NW. Cross-sectional view (left) and entire view (right). Red dots show active As atoms in Si. Blue dots, As precipitates; light blue dots, As-V clusters; orange dots, As at the oxide/Si interface; and yellow dots, As in the oxide.Back to article page