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Figure 5 | Nanoscale Research Letters

Figure 5

From: Effect of crystal plane orientation on the friction-induced nanofabrication on monocrystalline silicon

Figure 5

Comparison of the indentation force-depth curves on Si(100), Si(110), and Si(111) surfaces. Indentation force-depth curves during loading process measured by a diamond tip with R = 1 μm. The inset showed that the indentation force-depth curves on Si(100) surface during loading and unloading process overlapped with each other, suggesting that the deformation during indentation process was purely elastic.

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