Table 1 Temperatures and gas flows used for the growth of Zn 3 N 2 on 1.8 nm Au/Si(001)
TG(°C) | NH3(sccm) | H2(sccm) | |
---|---|---|---|
CVD1066 | 700 | 250 | - |
CVD1065 | 600 | 250 | - |
CVD1070 | 500 | 450 | 50 |
CVD1069 | 500 | 450 | - |
CVD1072 | 500 | 250 | - |
CVD1068 | 500 | 50 | - |
TG(°C) | NH3(sccm) | H2(sccm) | |
---|---|---|---|
CVD1066 | 700 | 250 | - |
CVD1065 | 600 | 250 | - |
CVD1070 | 500 | 450 | 50 |
CVD1069 | 500 | 450 | - |
CVD1072 | 500 | 250 | - |
CVD1068 | 500 | 50 | - |