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Figure 1 | Nanoscale Research Letters

Figure 1

From: Generation of high photocurrent in three-dimensional silicon quantum dot superlattice fabricated by combining bio-template and neutral beam etching for quantum dot solar cells

Figure 1

Schematic of the fabrication flow for 3D array of Si-NDs with SiC interlayer. (a) Deposition of 2-nm-thick SiC, 4-nm-thick poly-Si, and 3-nm-thick SiO2 layers. (b) Arrangement of 2D array of bio-template molecules on the surface. (c) Removal of bio-template protein shell by annealing in oxygen atmosphere. (d) NF3 treatment to remove surface SiO2 and NB etching to remove surface multilayers of poly-Si and SiC. (e) Removal of iron cores with HCl and NF3 treatment to etch remaining surface SiO2. (f) SiC deposition on Si-NDs.

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