Figure 3From: Surface roughness effects on the frequency tuning performance of a nanoelectromechanical resonatorFrequency tuning performance as a function of surface roughness of nanobeam. Observed in AFM image of surface morphology of Al-SiC. The surface roughness is a key parameter for the resonant frequency and tuning performance. The average roughness of the (a) R#1, (b) R#2, (c) R#3, and (d) R#4 samples varies from less than a nanometer to 30 nm.Back to article page