Figure 1

Refractive index variation for Si-rich Al ₂ O ₃ , pure amorphous Si, and Al ₂ O ₃ films. (a) Refractive index variation for pure amorphous Si and Al₂O₃ films as well as Si-rich-Al₂O₃ samples with different Si content, x = 0.50 (1), 0.22 (2), and 0.05 (3). (b) Simulated variation of the refractive index, n, taken at 2 eV, versus Si content (x) in Si-rich Al₂O₃ (solid line). The circle symbols of this curve represent experimental n values, used for estimation of the x values.