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Figure 2 | Nanoscale Research Letters

Figure 2

From: Si-rich Al2O3 films grown by RF magnetron sputtering: structural and photoluminescence properties versus annealing treatment

Figure 2

Micro-Raman spectra of as-deposited, RTA-, and CA-treated Si-rich Al 2 O 3 films. (a) Micro-Raman spectra of as-deposited Si-rich Al2O3 films with x = 0.68 (1) and x = 0.45 (2). The deconvolution of curve 2 to four Si-phonon bands is also present. The spectra are offset for clarity. (b) Variation of micro-Raman spectra after RTA and CA treatments on the same samples.

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