Figure 3From: Structural and nanomechanical properties of BiFeO3 thin films deposited by radio frequency magnetron sputteringNanoindentation results. (a) A typical load-displacement curve for BFO thin films deposited at 350°C. (b) The hardness-displacement curves. (c) Young's modulus-displacement curves for BFO thin films deposited at various deposition temperatures.Back to article page