Figure 3From: Structural and optical characterization of pure Si-rich nitride thin filmsEvolution of the refractive index of SiN x thin films. The films were produced by the N2-reactive and the co-sputtering methods as a function of [N]/[Si] ratio. The data are compared with a new model (black curve) and with two models (dashed curves) but concerning hydrogenated films.Back to article page