Figure 5From: Improvement of carrier diffusion length in silicon nanowire arrays using atomic layer depositionSEM image and EDS mapping of SiNW without and with Al 2 O 3 . (a) Cross-sectional SEM image of SiNWs without and with Al2O3. EDS mappings of (b) Al and (c) Si corresponding to the SiNWs shown in (a), respectively.Back to article page