Table 2 Data comparison in published literature

W/TiO _x /TaO _x /TiN [41]

0.15 × 0.15

3.0/-3.0

80

>3 h, 85°C

100

10⁴

Ir or Pt/Ta₂O_5-δTa_2-β/Pt [109, 120]

0.5 × 0.5

-1/+0.8

80/150

>10⁷

~10

10⁹

Pt/Ta₂O_5-x/TaO_2-x/Pt [31]

50 × 50-0.03 × 0.03

-2.0/+2.0

40-200

10 years, 85°C

~10

10¹²

Ru/Ta₂O₅/TiO₂/Ru [137]

4 × 4

+2.7/-1.0

~100

>10⁶

~50

10⁶

TiN/Ti/HfO _x /TiN [16, 138]

~0.4 × 0.4-0.03 × 0.03

1.0/-1.5

40, 200

>10⁴, 200°C

~100

10⁸

Hf, Ti, Ta/HfO₂/TiN [85]

0.04 × 0.04

+1.8/-3

100

>10⁴, 200°C

~10

10¹⁰

TiN/Hf/HfO₂/TiN [139]

0.01 × 0.01

±0.5

<80

10⁵, 200°C

~100

5 × 10⁷

Pt/ZrO _x /HfO _x /TiN [83]

0.05 × 0.05

0.6/-1.5

50

10⁵, 125°C

~100

10⁶

TiN/WO _x /TiN [140]

0.06 × 0.06

-1.4/+1.6

400

2 × 10³ h, 150°C

~10

10⁶