Figure 2From: Effects of post-deposition annealing ambient on band alignment of RF magnetron-sputtered Y2O3 film on gallium nitrideXPS O 1 s energy loss and valence band photoelectron spectrum. (a) Typical XPS O 1s energy loss spectrum of Y2O3 and interfacial layer for the sample annealed in O2 ambient. (b) Typical valence band spectrum of Y2O3 and interfacial layer for the sample annealed in O2 ambient.Back to article page