Figure 6From: Atomic layer deposition of high-density Pt nanodots on Al2O3 film using (MeCp)Pt(Me)3 and O2 precursors for nonvolatile memory applicationsPlanar TEM images of ALD Pt on Al 2 O 3 film. Corresponding to (a) 70 cycles, together with an electron diffraction image of selected area, and (b) 90 cycles.Back to article page