Figure 5From: Enhanced light absorption of amorphous silicon thin film by substrate control and ion irradiationThe cross-sectional views of irradiated films with different doses. (a) 1 × 1014 ions/cm2, (b) 5 × 1014 ions/cm2, (c) 10 × 1014 ions/cm2, and (d) 50 × 1014 ions/cm2.Back to article page