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Table 1 Details of spinning and drying

From: Enhanced light absorption of amorphous silicon thin film by substrate control and ion irradiation

Diameter of PS nanosphere (nm) Rate and time of spinning (r/min × min) Rate and time of drying (r/min × min)
200 120 × 1 350 × 4
500 120 × 1 250 × 4
1000 120 × 1 150 × 4