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Table 2 Concentrations of Si, C, and O in a-Si 1 - x - y C x O y films with several CO 2 /MMS flow rate ratios

From: Silicon quantum dot superlattice solar cell structure including silicon nanocrystals in a photogeneration layer

CO2/MMS

Si (at.%)

C (at.%)

O (at.%)

0

44.6

37.9

17.5

0.3

40.3

34.6

25.1

1.5

34.2

33.2

32.6

3.0

31.9

28.3

39.8

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