Table 2 Concentrations of Si, C, and O in a-Si 1 - x - y C x O y films with several CO 2 /MMS flow rate ratios
CO2/MMS | Si (at.%) | C (at.%) | O (at.%) |
---|---|---|---|
0 | 44.6 | 37.9 | 17.5 |
0.3 | 40.3 | 34.6 | 25.1 |
1.5 | 34.2 | 33.2 | 32.6 |
3.0 | 31.9 | 28.3 | 39.8 |
CO2/MMS | Si (at.%) | C (at.%) | O (at.%) |
---|---|---|---|
0 | 44.6 | 37.9 | 17.5 |
0.3 | 40.3 | 34.6 | 25.1 |
1.5 | 34.2 | 33.2 | 32.6 |
3.0 | 31.9 | 28.3 | 39.8 |