Figure 2From: Reusable three-dimensional nanostructured substrates for surface-enhanced Raman scatteringSEM images of nanopatterned quartz substrates with different nanoscale geometries after direct RIE etching with CF 4 /CHF 3 /SF 6 /Ar/O 2 mixing gases. (a) hemisphere nanostructure, (b) hemi-ellipsis nanostructure, and (c) pyramidal pit nanostructure.Back to article page