Figure 5
Deconvoluted Si-H stretching mode and correlation between the integrated intensity of MSM and oxygen content. (a) Typical deconvoluted Si-H stretching mode of the nc-Si:H thin film under RH = 98.2%. The solid curves are the overall fitting results using eight Gaussian peaks. (b) Correlation between the integrated intensity of the MSM and the oxygen content as a function of RH.