Account

Table 1 Imprint forces used in P2P NIL processes from research publications for several different imprint areas

From: A review of roll-to-roll nanoimprint lithography

Researcher	Imprint area	Imprint force (N)
Lebib et al. [22]	8 mm × 8 mm	32 to 192
Chou et al. [8]	15 mm × 18 mm	1,116 to 3,537
Shinohara et al. [23]	27.4-mm diameter disc	3,000
Beck et al. [24]	2-in. wafer	14,188
Lebib et al. [25]	4-in. wafer	40,536
Perret et al. [21]	8-in. wafer	20,000

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