Figure 6From: Tuning of strain and surface roughness of porous silicon layers for higher-quality seeds for epitaxial growthOut-of-plane tensile strain values of the as-etched double layer of PSi. Strain decreases and saturates as the LPL thickness increases, the dashed line is a trend for the eye. The maximum strain value corresponds to the high-porosity layer without any low-porosity on top (monolayer).Back to article page