Figure 1

AFM topographic images of InP surfaces bombarded by 1.9 keV Ar⁺ions at normal incidence and an ion flux f = 1.5 × 10¹⁴ cm⁻² s⁻¹with fluences of (a) 0.5, (b) 1, (c) 2, and (d) 3 × 10¹⁸ions cm⁻². The size of the images is (5 × 5) μm² and the height scale z is indicated. (e) Line profile across a selected part of the image shown in (b) displaying the cross sections of individual nanodots on the surface. (f) Normalized frequency distribution of the dot radius obtained for the image in (b).