Figure 4
AFM surface morphology of the as-deposited BaTiO 3 thin film. (a) 2D view, (a-1) 3D view, and (a-2) line profile of the selected area in the AFM images with a scan area of 10 × 10 μm2. AFM images of BaTiO3 thin films annealed for 60 s at different temperatures: 550°C (b), 650°C (c), and 750°C (d). The corresponding 3D view and line profiles of the selected areas are shown in (b-1) and (b-2) and (c-1) and (c-2) as well as (d-1) and (d-2), respectively.